Product Details
Brand Name: Jingtan
Certification: CE
Payment & Shipping Terms
Minimum Order Quantity: 1 set
Price: USD10,000-80,000/SET
Packaging Details: wooden case
Delivery Time: 60 days
Payment Terms: L/C/T/T
Supply Ability: 5pcs/month
Place Of Origin: |
Hunan, China |
Type: |
Induction Furnace |
Usage: |
Deposition Furnace |
Video Outgoing-inspection: |
Provided |
Machinery Test Report: |
Provided |
Core Components: |
PLC, Pump |
Brand Name: |
Jingtan |
Voltage: |
380V |
Weight (t): |
2 T |
Power (kw): |
220 |
Key Selling Points: |
Competitive Price |
Highest Temperature (℃): |
2200 |
Pressure Rise Rate (Pa/h): |
0.67 |
Heating Method: |
Resistance/induction |
Condition: |
New |
Marketing Type: |
Ordinary Product |
Warranty Of Core Components: |
1 Year |
Showroom Location: |
France, Germany |
Applicable Industries: |
Other, Semiconductor |
Place Of Origin: |
Hunan, China |
Type: |
Induction Furnace |
Usage: |
Deposition Furnace |
Video Outgoing-inspection: |
Provided |
Machinery Test Report: |
Provided |
Core Components: |
PLC, Pump |
Brand Name: |
Jingtan |
Voltage: |
380V |
Weight (t): |
2 T |
Power (kw): |
220 |
Key Selling Points: |
Competitive Price |
Highest Temperature (℃): |
2200 |
Pressure Rise Rate (Pa/h): |
0.67 |
Heating Method: |
Resistance/induction |
Condition: |
New |
Marketing Type: |
Ordinary Product |
Warranty Of Core Components: |
1 Year |
Showroom Location: |
France, Germany |
Applicable Industries: |
Other, Semiconductor |
Parameter /Model No.
|
JT-0305-C
|
JT-0505-C
|
JT-0608-C
|
JT-0608-C
|
JT-0812-C
|
JT-1120-C
|
JT-1218-C
|
JT-1520-C
|
Working Zone Size
φ×H(mm) |
300×500
|
500×500
|
600×800
|
600×1200
|
800×1200
|
1100×2000
|
1200×1800
|
1500×2000
|
Highest Temperature
(℃) |
2300
|
2300
|
2300
|
2300
|
2300
|
2300
|
2300
|
2300
|
Temperature uniformity(℃)
|
±5
|
±5
|
±5/±7.5
|
±7.5/±10
|
±7.5/±10
|
±10/±15
|
±10/±15
|
±15/±20
|
Limit Vacuum Degree(Pa)
|
1-100
|
1-100
|
1-100
|
1-100
|
1-100
|
1-100
|
1-100
|
1-100
|
Limit Vacuum Degree(Pa)
|
0.67
|
0.67
|
0.67
|
0.67
|
0.67
|
0.67
|
0.67
|
0.67
|
Heating method
|
Resistance/induction
|
Resistance/induction
|
Resistance/induction
|
Resistance/induction
|
Resistance/induction
|
Resistance/induction
|
Resistance/induction
|
Resistance/induction
|
Design temperature
|
1250℃/1650℃/1800℃/2200℃
|
Common temperature
|
900~1200℃
|
Vacuum degree
|
< 50Pa
|
Pressure rise rate
|
6.67pA /h(or 150Pa/24h) in cold state of empty furnace
|
Heating mode
|
graphite resistance heating or induction heating, independent temperature control, good temperature uniformity
|
Atmosphere medium
|
vacuum /CH4/C3H6/H2/N2/Ar
|
Gas control mode
|
mass flow meter control, multi-channel gas path, uniform flow field, no deposition dead Angle, good deposition effect;Multi-stage and efficient exhaust treatment system, environmentally friendly, easy to clean up
|
Furnace type
|
square, round, vertical or horizontal structure (non-standard design), fully enclosed deposition chamber, good sealing effect,
strong anti-pollution ability; |
Furnace cooling mode
|
furnace shell water cooling, external circulation quick cooling system can be selected, short cooling time, high production
efficiency; |
Structure form
|
horizontal - side discharge, vertical - up/down discharge
|
Locking mode
|
manual/automatic
|
Shell material
|
inner stainless steel/all stainless steel
|
Insulation material
|
carbon felt/graphite felt/carbon fiber cured felt
|
Infrared instrument
|
single colorimetric/double colorimetric
|
Power supply
|
KGPS/IGBT(only suitable for medium frequency heating)
Product parameter: |